ATS-HE26-C1-R1
Advanced Thermal Solutions Inc.
Product details
Advanced Thermal Solutions Inc.'s ATS-HE26-C1-R1 redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Active, Heat Exchanger system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 97 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.The 15 lbs (6.8 kg) structural design employs magnesium alloy framing, providing vibration isolation for nanometer-scale lithography applications.
Product Attributes
- Product Status: Active
- Product Type: Active, Heat Exchanger
- Power - Cooling: 97 W
- Current: -
- Voltage: -
- Flow Rate: -
- Power Input: -
- Thermal Resistance @ GPM: -
- Fluid Capacity: -
- Operating Temperature: -
- Connection Type: -
- Weight: 15 lbs (6.8 kg)
- Dimensions - Overall: -
- Ratings: -
- Features: -