ATS-CHILL150V
Advanced Thermal Solutions Inc.
ATS-CHILL150V
Advanced Thermal Solutions Inc.
RECIRC CHILLER 220V 150W
Reference Price (USD)
1+
$2258.91000
500+
$2236.3209
1000+
$2213.7318
1500+
$2191.1427
2000+
$2168.5536
2500+
$2145.9645
Exquisite packaging
Discount
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ATS-CHILL150V
$2,258.91
Product details
Advanced Thermal Solutions Inc.'s ATS-CHILL150V redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Active, Recirculating Chiller system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 150 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.Compatible with 220V mains power, the universal input design includes harmonic filtering to prevent contamination of sensitive metrology equipment power supplies.Precision flow control maintains 1.85-2.64GPM (7.0-10.0LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.The 1000ML (33.8 oz) fluid volume incorporates deionization monitoring, automatically triggering purification cycles when resistivity falls below 18M cm.Stable across 0°C ~ 40°C, the system utilizes Peltier-assisted heat exchangers for rapid temperature transitions during thermal cycling tests.The 22 lbs (10 kg) structural design employs magnesium alloy framing, providing vibration isolation for nanometer-scale lithography applications.With 10.24" L x 9.06" W x 14.90" H (260mm x 230mm x 380mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.
Product Attributes
- Product Status: Active
- Product Type: Active, Recirculating Chiller
- Power - Cooling: 150 W
- Current: -
- Voltage: 220V
- Flow Rate: 1.85-2.64GPM (7.0-10.0LPM)
- Power Input: -
- Thermal Resistance @ GPM: -
- Fluid Capacity: 1000ML (33.8 oz)
- Operating Temperature: 0°C ~ 40°C
- Connection Type: -
- Weight: 22 lbs (10 kg)
- Dimensions - Overall: 10.24" L x 9.06" W x 14.90" H (260mm x 230mm x 380mm)
- Ratings: -
- Features: -
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