9620100.02
JULABO
9620100.02
JULABO
F1000 CHILLER, 1KW, 115V
Reference Price (USD)
1+
$7941.00000
500+
$7861.59
1000+
$7782.18
1500+
$7702.77
2000+
$7623.36
2500+
$7543.95
Exquisite packaging
Discount
TT / Paypal / Credit Card / Western Union / Money Gram
9620100.02
$7,941.00
Product details
JULABO's 9620100.02 redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Active, Recirculating Chiller system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 1000 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.The 11 A current rating supports parallel pump operation with phase-shifted soft-start technology to prevent inrush current disturbances.Compatible with 115VAC mains power, the universal input design includes harmonic filtering to prevent contamination of sensitive metrology equipment power supplies.Precision flow control maintains 6.08GPM (23.0LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.Stable across -0°C ~ 40°C, the system utilizes Peltier-assisted heat exchangers for rapid temperature transitions during thermal cycling tests.The 99 lbs (44.9 kg) structural design employs magnesium alloy framing, providing vibration isolation for nanometer-scale lithography applications.With 19.30" L x 14.80" W x 25.20" H (490.2mm x 375.9mm x 640.1mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.Advanced Temperature Control include FOUP-compatible interfaces and SECS/GEM protocol support for automated material handling system integration.
Product Attributes
- Product Status: Active
- Product Type: Active, Recirculating Chiller
- Power - Cooling: 1000 W
- Current: 11 A
- Voltage: 115VAC
- Flow Rate: 6.08GPM (23.0LPM)
- Power Input: -
- Thermal Resistance @ GPM: -
- Fluid Capacity: -
- Operating Temperature: -0°C ~ 40°C
- Connection Type: -
- Weight: 99 lbs (44.9 kg)
- Dimensions - Overall: 19.30" L x 14.80" W x 25.20" H (490.2mm x 375.9mm x 640.1mm)
- Ratings: -
- Features: Temperature Control
You May Also Be Interested In
