ATS-TCP-1004
Advanced Thermal Solutions Inc.
Product details
Advanced Thermal Solutions Inc.'s ATS-TCP-1004 redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Passive, Cold Plate system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 400 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.Precision flow control maintains 0.50 - 2.00GPM (1.9-7.6LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.Demonstrating 0.008°C/W @ 2.0 GPM thermal performance, the microchannel cold plate design achieves 40% better heat transfer than conventional designs.With 12.01" L x 7.01" W x 0.59" H (305.0mm x 178.0mm x 15.0mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.
Product Attributes
- Product Status: Active
- Product Type: Passive, Cold Plate
- Power - Cooling: 400 W
- Current: -
- Voltage: -
- Flow Rate: 0.50 - 2.00GPM (1.9-7.6LPM)
- Power Input: -
- Thermal Resistance @ GPM: 0.008°C/W @ 2.0 GPM
- Fluid Capacity: -
- Operating Temperature: -
- Connection Type: -
- Weight: -
- Dimensions - Overall: 12.01" L x 7.01" W x 0.59" H (305.0mm x 178.0mm x 15.0mm)
- Ratings: -
- Features: -