9032704.02
JULABO
9032704.02
JULABO
MAGIO MS-600F REFRIGERATED/HEATI
Reference Price (USD)
1+
$12893.00000
500+
$12764.07
1000+
$12635.14
1500+
$12506.21
2000+
$12377.28
2500+
$12248.35
Exquisite packaging
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9032704.02
$12,893.00
Product details
JULABO's 9032704.02 redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Refrigerated/Heating Circulator system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 440 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.Compatible with 115V mains power, the universal input design includes harmonic filtering to prevent contamination of sensitive metrology equipment power supplies.Precision flow control maintains 8.19GPM (31.0LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.The 7500ML (253.6 oz) fluid volume incorporates deionization monitoring, automatically triggering purification cycles when resistivity falls below 18M cm.Stable across -35°C ~ 200°C, the system utilizes Peltier-assisted heat exchangers for rapid temperature transitions during thermal cycling tests.With 18.50" L x 13.00" W x 27.00" H (469.9mm x 330.2mm x 685.8mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.Meeting CE certification requirements, all wetted materials comply with SEMI F57 standards for high-purity fluid handling.Advanced Adjustable Pump, USB A, USB B, RS232/RS485, Ethernet, Stakei Output, External Pt100 include FOUP-compatible interfaces and SECS/GEM protocol support for automated material handling system integration.
Product Attributes
- Product Status: Active
- Product Type: Refrigerated/Heating Circulator
- Power - Cooling: 440 W
- Current: -
- Voltage: 115V
- Flow Rate: 8.19GPM (31.0LPM)
- Power Input: -
- Thermal Resistance @ GPM: -
- Fluid Capacity: 7500ML (253.6 oz)
- Operating Temperature: -35°C ~ 200°C
- Connection Type: -
- Weight: -
- Dimensions - Overall: 18.50" L x 13.00" W x 27.00" H (469.9mm x 330.2mm x 685.8mm)
- Ratings: CE
- Features: Adjustable Pump, USB A, USB B, RS232/RS485, Ethernet, Stakei Output, External Pt100
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