9012703.02
JULABO
Product details
JULABO's 9012703.02 redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Refrigerated/Heating Circulator system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 280 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.Compatible with 115V mains power, the universal input design includes harmonic filtering to prevent contamination of sensitive metrology equipment power supplies.Precision flow control maintains 3.96GPM (15.0LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.The 4000ML (135.3 oz) fluid volume incorporates deionization monitoring, automatically triggering purification cycles when resistivity falls below 18M cm.Stable across -25°C ~ 150°C, the system utilizes Peltier-assisted heat exchangers for rapid temperature transitions during thermal cycling tests.With 16.50" L x 9.40" W x 26.00" H (419.1mm x 238.8mm x 660.4mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.Meeting CE, cULus certification requirements, all wetted materials comply with SEMI F57 standards for high-purity fluid handling.Advanced Flow Diverter, USB A, USB B include FOUP-compatible interfaces and SECS/GEM protocol support for automated material handling system integration.
Product Attributes
- Product Status: Active
- Product Type: Refrigerated/Heating Circulator
- Power - Cooling: 280 W
- Current: -
- Voltage: 115V
- Flow Rate: 3.96GPM (15.0LPM)
- Power Input: -
- Thermal Resistance @ GPM: -
- Fluid Capacity: 4000ML (135.3 oz)
- Operating Temperature: -25°C ~ 150°C
- Connection Type: -
- Weight: -
- Dimensions - Overall: 16.50" L x 9.40" W x 26.00" H (419.1mm x 238.8mm x 660.4mm)
- Ratings: CE, cULus
- Features: Flow Diverter, USB A, USB B