385737-001
Laird Thermal Systems, Inc.
385737-001
Laird Thermal Systems, Inc.
RECIRC CHILLR/HEATER 2.9LPM 149W
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385737-001
$2,564.90
Product details
Laird Thermal Systems, Inc.'s 385737-001 redefines thermal control standards in Thermal - Liquid Cooling, Heating, optimized for semiconductor manufacturing processes requiring sub-degree temperature accuracy. This precision instrument combines multi-stage cooling with real-time thermal profiling, essential for wafer fabrication cleanrooms.As a Active, Recirculating Chiller/Heater system, it incorporates dual redundant cooling circuits with automatic load balancing, ensuring continuous operation during maintenance cycles.The 149 W thermal capacity handles simultaneous cooling of multiple process chambers, featuring adaptive PID control for 0.1 C setpoint maintenance.The 4.7 A current rating supports parallel pump operation with phase-shifted soft-start technology to prevent inrush current disturbances.Compatible with 115 ~ 240VAC mains power, the universal input design includes harmonic filtering to prevent contamination of sensitive metrology equipment power supplies.Precision flow control maintains 0.76GPM (2.9LPM) with 0.5% repeatability, critical for maintaining uniform etch rates across semiconductor wafers.At 294W nominal consumption, the variable frequency drive adjusts pump speed to match real-time process cooling demands.The 250ML (8.4 oz) fluid volume incorporates deionization monitoring, automatically triggering purification cycles when resistivity falls below 18M cm.Stable across 4°C ~ 45°C, the system utilizes Peltier-assisted heat exchangers for rapid temperature transitions during thermal cycling tests.The 3/8" Quick Connect fluidic connections utilize ultra-clean VCR fittings with <0.01ppb particle generation for contamination-sensitive applications.The 24 lbs (10.9 kg) structural design employs magnesium alloy framing, providing vibration isolation for nanometer-scale lithography applications.With 13.82" L x 7.68" W x 11.97" H (351.0mm x 195.1mm x 304.0mm) dimensions, the vertical stack configuration saves valuable cleanroom floor space while maintaining service accessibility.Meeting UL61010-1 certification requirements, all wetted materials comply with SEMI F57 standards for high-purity fluid handling.Advanced Temperature Control include FOUP-compatible interfaces and SECS/GEM protocol support for automated material handling system integration.
Product Attributes
- Product Status: Active
- Product Type: Active, Recirculating Chiller/Heater
- Power - Cooling: 149 W
- Current: 4.7 A
- Voltage: 115 ~ 240VAC
- Flow Rate: 0.76GPM (2.9LPM)
- Power Input: 294W
- Thermal Resistance @ GPM: -
- Fluid Capacity: 250ML (8.4 oz)
- Operating Temperature: 4°C ~ 45°C
- Connection Type: 3/8" Quick Connect
- Weight: 24 lbs (10.9 kg)
- Dimensions - Overall: 13.82" L x 7.68" W x 11.97" H (351.0mm x 195.1mm x 304.0mm)
- Ratings: UL61010-1
- Features: Temperature Control
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